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Computlitho.com: Computational Lithography Online

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March | 2015 | Computational Lithography

Almost anything you need to know about lithography as an EDA professional is on this one image. The fundamental equation of lithography is that the resolution is: k k 1 is the Rayleigh parame...
Computational Lithography

Computational Lithography

http://www.computlitho.com/?p=156 Continue reading What you need to know about lithography as an EDA professional? →]]> Process names are increasingly just names. The critical thing is what is the min...